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Systema plasma MYW10 admodum flexibile, altum per laganum processum curationis superficiei tradit.
• Atmosphaerico-pressio argonis plasma systematis
• 100mm massae processus inlinei plasmatis latis; offert 2-5 temporibus altiorem efficientiam et super XXX% inferiores pretia laboris ad traditional modos
• 100% plasma neutrum; tutus et lenis in componentibus electronic sensitivis — nulla plasma bombardarum, electricitatis statice, scintillae, arcus, pulvis, calor altus, undarum superficies, vel radiatio UV, nullum damnum productum praestans.
• processus chemici versatiles: O2 processus ad contaminantium tollendos organicos; H2 processum ad removendum oxydatum metallum et activum productum superficierum
• nullam particulam contagione seu mutationes in superficie asperitatis in laganum
• Compatible cum lagano et taeniolis fabricatio fabricatio, permittens celeri mutandi inter duos
• Meets Classis X cleanroom et SEMI signa
| Basic Parameters | MYW10 |
| Potentia Requirements | AC 380V, 13kW, 20A, 50/60Hz |
| Air Pressure Requirements | 90psi (6bar) |
| Dimensiones | 2000 x 2800 x 2200 mm |
| Pondus | 2200 kg |
| Certification signa | SEMI S2/S6/S8 |
| Positioning Cura | XY: ±20 µm @3σ; Z: ±10 µm @ 3σ |
| XYZ-Axis Repeatability | XY: ±10 µm @3σ; Z: ±5 µm @ 3σ |
| Maximum Volo | 1000 mm/s (XY) |
| Acceleratio | 1.0g |
| Coegi Ratio | AC servo |
| Opus Specifications Platform | |
| Loading / Unloading Methodo | OHT + Load Port + Robotic Arm |
| Robotic brachium Payload | 3 kg |
| Compatible Wafer Location | 12-inch (300 mm) |
| Software Operating System | Windows 10 |
| X/Y Travel | 400 mm / 500 mm |
| Z-Axis Travel | 20mm |
| Communication Protocol | SECS/GEM |
| Operans dolor | |
| Plasma Curatio Area (W×D) | 300×300mm |
| Post-curatio aqua Contact Angulus (WCA) | WCA < 10° (laganum Pii) |
| Plasma Curatio Methodi | C2 processus organicum contaminant remotionem H2 processum ad metallum oxydatum remotionem |
| Plasma System Requirements | |
| RF Power | 600W apud 27.12MHz |
| Principalis Plasma Gas | Argon |
| Processus Gas | O2, N2, vel H2 |
| Gas Supple Impetus dolor | 40-100 psi (0.3-0.7 MPa) |
Oratio
5th Solum, Aedificium 2, No. CLXXXII, Chang'an Xi'an via, Chang'an Oppidum, Dongguan, Guangdong Provincia, Sinis.
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